Nov 11, 2024  
2022-2024 Graduate Catalog 
    
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2022-2024 Graduate Catalog [ARCHIVED CATALOG]

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EEGR 642 - Semiconductor Fabrication Technology

3 hours.
3 Credits

Overview of the fundamental principles of semiconductor fabrication technology is presented. Topics include basic material review; methods of oxidation; methods of deposition/diffusion and ion implantation, principles of epitaxial deposition/ growth, photolithographic technology, chemical vapor deposition/nitride, silicon dioxide, and metallization technology.

Offered (FALL OR SPRING)


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