Apr 23, 2024  
2018-2020 Graduate School Catalog 
    
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2018-2020 Graduate School Catalog [ARCHIVED CATALOG]

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EEGR 642 - Semiconductor Fabrication Technology

Three hours.
3 Credits

Overview of the fundamental principles of semiconductor fabrication technology is presented. Topics include basic material review; methods of oxidation; methods of deposition/diffusion and ion implantation, principles of epitaxial deposition/ growth, photolithographic technology, chemical vapor deposition/nitride, silicon dioxide, and metallization technology.

Prerequisite(s) None
Co-Requisite(s) None
Offered FALL OR SPRING


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