May 11, 2025  
2018-2020 Graduate School Catalog 
    
Catalog Navigation
  Catalog Home
  Message from the Dean
  About MSU
  Academic Calendar
  Graduate Admissions and Registration
  Standards of Scholarship
  Graduate Finances and Financial Aid
  Academic Resources and Services
  Graduate Programs
  Course Descriptions
  Clarence M. Mitchell School of Engineering
  School of Global Journalism and Communication
  College of Liberal Arts
  Earl G. Graves School of Business and Management
  School of Architecture and Planning
  School of Community Health and Policy
  School of Computer, Mathematical, and Natural Sciences
  School of Education and Urban Studies
  School of Social Work
  Administrators of the University
  Graduate Faculty
  Appendices
  My Portfolio
HELP
2018-2020 Graduate School Catalog [ARCHIVED CATALOG]

Facebook this Page (opens a new window)
Tweet this Page (opens a new window)
Add to Portfolio (opens a new window)

EEGR 642 - Semiconductor Fabrication Technology

Three hours.
3 Credits

Overview of the fundamental principles of semiconductor fabrication technology is presented. Topics include basic material review; methods of oxidation; methods of deposition/diffusion and ion implantation, principles of epitaxial deposition/ growth, photolithographic technology, chemical vapor deposition/nitride, silicon dioxide, and metallization technology.

Prerequisite(s) None
Co-Requisite(s) None
Offered FALL OR SPRING


Facebook this Page (opens a new window)
Tweet this Page (opens a new window)
Add to Portfolio (opens a new window)